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翻訳と辞書　辞書検索 [ 開発暫定版 ] スポンサード リンク Alcatel Micro Machining Systems ： ウィキペディア英語版 Alcatel Micro Machining Systems Alcatel Micro Machining Systems (AMMS) was a French manufacturer of Deep Reactive Ion Etching systems. The company's headquarters were located in Annecy, France. == History == Alcatel Vacuum Technology, AMMS' original parent company, had a long-running business in plasma processing. Its first equipment based on an Alcatel patented Inductive Coupled Plasma (ICP) source, with independent source power and substrate bias control for deep etching of silicon, was launched in 1993. AMMS was created as a subsidiary in 2006 to focus on silicon etching.〔 Alcatel Micro Machining Systems operated until 2008, when it was sold to the Tegal Company. In 2011 SPTS acquired Tegal's DRIE assets (formerly AMMS). The deal included the transfer to SPTS of the capital stock and operations of Tegal France SAS, a wholly owned Tegal subsidiary. 抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』 ■ウィキペディアで「Alcatel Micro Machining Systems」の詳細全文を読む スポンサード リンク 翻訳と辞書 : 翻訳のためのインターネットリソース Copyright(C) kotoba.ne.jp 1997-2016. All Rights Reserved.